Display device and semiconductor device

ABSTRACT

An object is to provide a display device with a high aperture ratio or a semiconductor device in which the area of an element is large. A channel formation region of a TFT with a multi-gate structure is provided under a wiring that is provided between adjacent pixel electrodes (or electrodes of an element). In addition, a channel width direction of each of a plurality of channel formation regions is parallel to a longitudinal direction of the pixel electrode. In addition, when a channel width is longer than a channel length, the area of the channel formation region can be increased.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.16/240,834, filed Jan. 7, 2019, now allowed, which is a continuation ofU.S. application Ser. No. 15/874,939, filed Jan. 19, 2018, now U.S. Pat.No. 10,181,506, which is a continuation of U.S. application Ser. No.15/421,611, filed Feb. 1, 2017, now U.S. Pat. No. 9,941,346, which is acontinuation of U.S. application Ser. No. 14/989,886, filed Jan. 7,2016, now U.S. Pat. No. 9,564,539, which is a continuation of U.S.application Ser. No. 14/726,752, filed Jun. 1, 2015, now U.S. Pat. No.9,236,404, which is a continuation of U.S. application Ser. No.14/661,078, filed Mar. 18, 2015, now U.S. Pat. No. 9,257,451, which is acontinuation of U.S. application Ser. No. 14/275,962, filed May 13,2014, now U.S. Pat. No. 9,029,859, which is continuation of U.S.application Ser. No. 13/848,878, filed Mar. 22, 2013, now U.S. Pat. No.8,969,859, which is a continuation of U.S. application Ser. No.12/982,200, filed Dec. 30, 2010, now U.S. Pat. No. 8,426,860, which is acontinuation of U.S. application Ser. No. 11/772,924, filed Jul. 3,2007, now U.S. Pat. No. 7,863,612, which claims the benefit of a foreignpriority application filed in Japan as Serial No. 2006-199292 on Jul.21, 2006, all of which are incorporated by reference.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to an active matrix display device and asemiconductor device in which elements are arranged in matrix.

2. Description of the Related Art

As an image display device, a liquid crystal display device, anelectroluminescence (hereinafter referred to as “EL”) display device,and the like have been previously known. As types of these displaydevices, there are a passive matrix display device and an active matrixdisplay device. The active matrix display device can perform high-speedoperation even when the number of pixels is increased.

As the active matrix display device, a TFT, a capacitor, a wiring, apixel electrode, and the like are formed over one substrate; because ofthis, an aperture ratio tends to decrease. Accordingly, an attempt toincrease the aperture ratio is done by creating design such asmaterials, shapes, the number, or arrangement of the TFT, the capacitor,the wiring, the pixel electrode, and the like. For example, a method fordecreasing the area of a capacitor by using tantalum oxide, which has ahigh dielectric constant, as a dielectric of the capacitor is disclosedin Patent Document 1.

-   Patent Document 1: Japanese Published Patent Application No.    H11-312808.

SUMMARY OF THE INVENTION

On the other hand, there is a problem in that, in order to increase theaperture ratio, a method in which a material with a high dielectricconstant is used for a capacitor leads to an increase in the number ofmanufacturing steps.

Here, in order to increase the aperture ratio without increasing thenumber of manufacturing steps, the area of an opening may be increased.However, when an opening is provided between wirings in order toincrease the area of the opening, the shape of the opening is a complexshape. In an EL display device, when the shape of an opening is acomplex shape, the length of an edge (end) of the opening becomeslonger; therefore, a problem arises in that shrinkage of an ELlight-emitting portion is promoted.

Here, the shrinkage of the EL light-emitting portion refers to a statein which an effective area of an EL element (an area of a portion inwhich the EL element emits light) gradually decreases starting from anend, not a state in which an EL layer physically decreases.

In addition, in a semiconductor device (e.g. DRAM or the like) otherthan a display device, it is preferable that the area of an elementconnected to a transistor be increased.

Thus, it is an object of the present invention to provide a displaydevice with a high aperture ratio (or a semiconductor device with alarge area of an element).

In this specification, a channel formation region of a TFT means asemiconductor region which is placed under a gate electrode with a gateinsulating film interposed therebetween. A channel length means thelength in a direction in which carriers flow in the channel formationregion. A channel width means the length of the channel formationregion, which is perpendicular to a channel length direction.

Note that in the case of a TFT with a multi-gate structure, the channellength and the channel width refer to the dimensions of each channelformation region.

In addition, a multi-gate structure is a structure in which one TFTincludes a plurality of channel formation regions. On the other hand, asingle-gate structure is a structure in which one TFT includes onechannel formation region.

A display device of the present invention includes a wiring providedbetween adjacent pixel electrodes and a thin film transistor, where achannel formation region of the thin film transistor is provided underthe wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a direction in which currentflows through the wiring.

In addition, a display device of the present invention includes a wiringprovided between adjacent pixel electrodes and a thin film transistorthat includes a plurality of channel formation regions, where theplurality of channel formation regions is provided under the wiring, theplurality of channel formation regions is provided at a positionoverlapping with the wiring, and a channel width direction of each ofthe plurality of channel formation regions is parallel to a direction inwhich current flows through the wiring.

In addition, a display device of the present invention includes a wiringprovided between adjacent pixel electrodes and a thin film transistor,where a channel formation region of the thin film transistor is providedunder the wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a longitudinal direction of thewiring.

In addition, a display device of the present invention includes a wiringprovided between adjacent pixel electrodes and a thin film transistorthat includes a plurality of channel formation regions, where theplurality of channel formation regions is provided under the wiring, theplurality of channel formation regions is provided at a positionoverlapping with the wiring, and a channel width direction of each ofthe plurality of channel formation regions is parallel to a longitudinaldirection of the wiring.

In addition, a display device of the present invention includes a wiringprovided between adjacent pixel electrodes and a thin film transistor,where a channel formation region of the thin film transistor is providedunder the wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a longitudinal direction of thepixel electrode.

In addition, a display device of the present invention includes a wiringprovided between adjacent pixel electrodes and a thin film transistorthat includes a plurality of channel formation regions, where theplurality of channel formation regions is provided under the wiring, theplurality of channel formation regions is provided at a positionoverlapping with the wiring, and a channel width direction of each ofthe plurality of channel formation regions is parallel to a longitudinaldirection of the pixel electrode.

One feature of the display device of the present invention is that thethin film transistor operates in a linear region.

A voltage between a gate and a source of a transistor is set as Vgs, avoltage between the source and a drain of the transistor is set as Vds,and a threshold voltage of the transistor is set as Vth. In this case, arange where a relational expression of |Vgs−Vth|>|Vds| is satisfied isreferred to as a linear region.

That is, one feature is that the thin film transistor operates in therange where the voltage (Vgs) between the gate and the source is greaterthan or equal to the voltage (Vds) between the source and the drain bythe amount of the threshold voltage (Vth) or more.

One feature of the display device of the present invention is that achannel width of the channel formation region is longer than a channellength of the channel formation region.

One feature of the display device of the present invention is that alongitudinal direction of an impurity region connecting the channelformation regions is parallel to a channel width direction.

One feature of the display device of the present invention is that thechannel formation region is at least one of an amorphous semiconductorand a polycrystalline semiconductor.

One feature of the display device of the present invention is that thechannel forming region is single crystal.

One feature of the display device of the present invention is that thethin film transistor includes an island-shaped semiconductor layer, agate insulating film, and a gate electrode, where the island-shapedsemiconductor layer includes the plurality of channel formation regionsand a plurality of impurity regions, and a gate electrode is formed overthe plurality of channel formation regions with a gate insulating filminterposed therebetween.

One feature of the display device of the present invention is that thewiring is formed over the gate electrode with an interlayer insulatingfilm interposed therebetween.

One feature of the display device of the present invention is that afirst capacitor that includes the island-shaped semiconductor layer, thegate insulating film over the island-shaped semiconductor layer and thegate electrode over the gate insulating film, and a second capacitorthat includes the gate electrode, the interlayer insulating film overthe gate electrode and the wiring over the interlayer insulating filmare formed.

One feature of the display device of the present invention is that alongitudinal direction of the gate electrode is the channel widthdirection.

One feature of the display device of the present invention is that thewiring is formed under a partition wall (insulator) that is formed tocover an end of the pixel electrode.

One feature of the display device of the present invention is thateither one of a source terminal (region) or drain terminal (region) ofthe thin film transistor is connected to one of the adjacent pixelelectrodes.

One feature of the display device of the present invention is that theother one of the source terminal (region) or drain terminal (region) ofthe thin film transistor is connected to the wiring.

A semiconductor device of the present invention includes a wiringprovided between adjacent electrodes and a thin film transistor, where achannel formation region of the thin film transistor is provided underthe wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a direction in which currentflows through the wiring (or a longitudinal direction of the wiring).

In addition, a semiconductor device of the present invention includes awiring provided between adjacent electrodes and a thin film transistor,where a channel formation region of the thin film transistor is providedunder the wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a longitudinal direction of theelectrode.

In addition, a semiconductor device of the present invention includes awiring provided between adjacent elements and a thin film transistor,where a channel formation region of the thin film transistor is providedunder the wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a direction in which currentflows through the wiring (or a longitudinal direction of the wiring).

In addition, a semiconductor device of the present invention includes awiring provided between adjacent elements and a thin film transistor,where a channel formation region of the thin film transistor is providedunder the wiring, the channel formation region is provided at a positionoverlapping with the wiring, and a channel width direction of thechannel formation region is parallel to a longitudinal direction of theelement.

One feature of the semiconductor device of the present invention is thata channel width of the channel formation region is longer than a channellength of the channel formation region.

According to the present invention, a display device with a highaperture ratio (or a semiconductor device in which the area of anelement is large) can be realized.

In addition, the shape of a pixel electrode (or an electrode of anelement) need not to be a complex shape in order to increase theaperture ratio.

Furthermore, by increasing the aperture ratio, current density for anelement is lowered; because of this, the life of an element can belengthened.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a layout 1 of a double-gate structure.

FIG. 2 is a layout 2 of a double-gate structure.

FIG. 3 is a circuit diagram of a pixel.

FIGS. 4A to 4D show the flow of manufacturing of a TFT (top views).

FIG. 5 is a diagram of a pixel electrode and a wiring (wiring shape:straight line).

FIG. 6 is a diagram of a pixel electrode and a wiring (wiring shape:zigzag).

FIG. 7 is a diagram of a pixel electrode and a wiring (wiring shape:meandering).

FIG. 8 is a layout 1 of a single-gate structure.

FIG. 9 is a layout 2 of a single-gate structure.

FIG. 10 is a layout 1 of a triple-gate structure.

FIG. 11 is a layout 2 of a triple-gate structure.

FIGS. 12A to 12C are each a cross-sectional view 1 of an inorganic ELelement.

FIGS. 13A to 13C are each a cross-sectional view 2 of an inorganic ELelement.

FIG. 14A is a top view of a display device, and FIG. 14B is across-sectional view of the display device.

FIGS. 15A and 15B are each a circuit diagram for DRAM.

FIG. 16 is a layout for DRAM.

FIGS. 17A to 17F are examples of electronic devices.

DETAILED DESCRIPTION OF THE INVENTION

Hereinafter, embodiment modes of the present invention will be describedwith reference to the accompanying drawings. However, the presentinvention can be implemented in various modes. As can be easilyunderstood by a person skilled in the art, the modes and details of thepresent invention can be changed in various ways without departing fromthe spirit and scope of the present invention. Thus, the presentinvention should not be interpreted as being limited to the followingdescription of the embodiment modes.

Note that each of Embodiment Modes 1 to 11 can be combined, asappropriate.

Embodiment Mode 1

In this embodiment mode, a pixel structure and a layout of a displaydevice of the present invention will be described. Note that a pixelformed of two TFTs is described here.

First, the pixel structure of the display device of the presentinvention is described with reference to FIG. 3. A pixel includes a TFT(driving TFT 301) connected to a pixel electrode, a capacitor 300, aswitching TFT 302, a display element 303, a scanning line 305, a signalline 304, and a power supply line 306. Note that the driving TFT 301 andthe switching TFT 302 each have a double-gate structure that includestwo channel formation regions.

Note that the driving TFT 301 may have a single-gate structure or amulti-gate structure that includes three or more channel formationregions.

Either one of a source terminal or drain terminal of the switching TFT302 is connected to the signal line 304.

A gate terminal of the switching TFT 302 is connected to the scanningline 305.

The other one of the source terminal or drain terminal of the switchingTFT 302 is electrically connected to a gate terminal of the driving TFT301 and one electrode of the capacitor.

Either one of a source terminal or drain terminal of the driving TFT 301is connected to the power supply line 306.

The other one of the source terminal or drain terminal of the drivingTFT 301 is connected to the display element 303.

A gate terminal of the driving TFT 301 is connected to one electrode ofthe capacitor and the other one of the source terminal or drain terminalof the switching TFT 302.

The other terminal of the capacitor 300 is electrically connected to thepower supply line 306.

One terminal of the capacitor 300 is electrically connected to the gateterminal of the driving TFT 301 and the other one of the source terminalor drain terminal of the switching TFT 302.

Next, a layout of a pixel portion is described with reference to FIGS. 1and 2. FIG. 2 is a top view corresponding to FIG. 1 and a diagram of astage in which a first semiconductor layer 101, a second semiconductorlayer 102, a gate wiring 105, and a gate electrode 100 are formed.

The correspondence relation among FIGS. 1, 2, and 3 is described.

A portion encircled by a dashed line portion 6001 corresponds to thedriving TFT 301.

A portion encircled by a dashed line portion 6011 corresponds to theswitching TFT 302.

A portion encircled by a dashed line portion 6012 corresponds to thecapacitor 300.

A pixel electrode 107 corresponds to the pixel electrode of the displayelement 303.

A signal line 104 corresponds to the signal line 304.

A power supply line 106 corresponds to the power supply line 306.

In FIG. 1, the first semiconductor layer 101 is an island-shapedsemiconductor layer of the switching TFT. A region that overlaps withthe gate wiring 105 is a channel formation region. A region that isconnected to the signal line 104 is a source terminal (or a drainterminal). A region that is connected to a connection electrode 103through a contact hole is a drain terminal (or a source terminal). Notethat the switching TFT has a double-gate structure that includes twochannel formation regions.

Note that the switching TFT may have a single-gate structure or amulti-gate structure that includes three or more channel formationregions.

In addition, the second semiconductor layer 102 is an island-shapedsemiconductor layer of the driving TFT 301 that drives the displayelement. A region that overlaps with the gate electrode 100 is a channelformation region. The gate electrode of the driving TFT 301 is connectedto the connection electrode 103 through a contact hole. Further, thesource terminal (or the drain terminal) of the driving TFT 301 and thepower supply line 106 are connected to each other through a contacthole. The drain terminal (or the source terminal) of the driving TFT 301and a connection electrode 108 are connected to each other through acontact hole. In addition, the pixel electrode 107 is formed in contactwith the connection electrode 108.

In addition, in the second semiconductor layer 102, the power supplyline 106 is arranged over the channel formation region that overlapswith the gate electrode 100 with a gate insulating film interposedtherebetween. A capacitor that is formed between the gate electrode 100and the power supply line 106 can be used as a storage capacitor of thedisplay element.

An interlayer insulating film is interposed between the gate electrode100 and the power supply line 106.

In addition, the gate electrode 100 serves as one electrode of thecapacitor and a portion that overlaps with the gate electrode of thepower supply line serves as the other electrode of the capacitor.

In addition, in order to prevent a short circuit of the electrode of thedisplay element, a region other than a light emitting area is coveredwith a partition wall (insulator). A width of a partition wall providedbetween right and left pixels that are adjacent to each other isapproximately 20 μm to 25 μm, for example. In this embodiment mode, thesignal line 104 and the power supply line 106 are arranged under apartition wall that has a width of 20 μm (that is, between adjacentpixel electrodes).

Note that, in this embodiment mode, a longitudinal direction of thepower supply line 106 is arranged parallel to a longitudinal directionof the pixel electrode. Furthermore, a driving TFT is arranged under thepower supply line 106 so that the driving TFT and the power supply line106 overlap with each other. In addition, a channel width direction isarranged parallel to the longitudinal direction.

However, in the present invention, it is not always necessary that thepower supply line 106 be arranged parallel to the longitudinal directionof the pixel electrode and the driving TFT 301 be arranged under thepower supply line 106.

Therefore, when the signal line 104 is arranged parallel to thelongitudinal direction of the pixel electrode, the driving TFT 301 maybe arranged under the signal line 104 so that the driving TFT 301 andthe signal line 104 overlap with each other.

In addition, when the shape of the pixel electrode has no longitudinaldirection such as when the shape is a square, an approximate square (forexample, a square with a truncated corner, a square with a roundedcorner (not all of the corners are necessarily rounded, and some of thecorners may be rounded), or the like), or a circle, there is no problemeven when the driving TFT 301 is arranged under either the power supplyline 106 or the signal line 104.

Note that as the shape of the pixel electrode, various shapes areconsidered, such as a rectangle, an approximate rectangle (for example,a rectangle with a truncated corner, a rectangle with a rounded corner(not all of the corners are necessarily rounded, and some of the cornersmay be rounded)), an ellipse, a polygon, or an approximate polygon (forexample, a polygon with a truncated corner or a polygon with a roundedcorner (not all of the corners are necessarily rounded, and some of thecorners may be rounded)). Note that the shape of the pixel electrode isnot limited to these described shapes. Note also that when the shape ofthe pixel electrode is a rectangle or an approximate rectangle, a wiringis easily arranged in lattice form, whereby design layout is easilyperformed, which is preferable.

In addition, the size of the pixel electrode may be different for eachpixel. Furthermore, the shape of the pixel electrode may be differentfor each pixel.

In addition, when a required channel width is shorter than the length ofa short side direction of the pixel electrode, the driving TFT 301 maybe arranged under a wiring so that the driving TFT 301 and the wiringthat is arranged parallel to the short side direction overlap with eachother.

In addition, a part of the power supply line 106 may be arranged over orunder the pixel electrode. In the case of such an arrangement, the gateelectrode of the driving TFT 301 may be arranged so as to overlap with apart of the power supply line 106.

Note that a channel width direction of the driving TFT 301 is arrangedparallel to a longitudinal direction of the wiring. Thus, the channelwidth can be increased. In addition, since the wiring is arrangedbetween the adjacent pixel electrodes, the longitudinal direction of thewiring is arranged parallel to the longitudinal direction or short sidedirection of the pixel electrode, whereby the aperture ratio can beincreased.

Note that since current generally flows in die longitudinal direction ofthe wiring, the channel width direction can be referred to as adirection parallel to the direction in which current flows through thewiring arranged over the channel formation region.

In addition, a case of operation in a linear region is shown in thisembodiment mode. The driving TFT has a double-gate structure of L<W,where a channel length is L and a channel width is W. Here, the drivingTFT has a double-gate structure in which L is approximately 7 μm and Wis approximately 20 μm. When the design of the layout of the pixel isperformed, by arranging the wiring under a partition wall that has awidth of 20 μm and arranging the driving TFT under the wiring, theaperture ratio can be increased even when the size of the driving TFT isincreased.

In this embodiment mode, patterning is performed such that thesemiconductor layer is bent to be U-shaped with respect to the gateelectrode 100 (the dashed line portion 6001 in FIGS. 1 and 2). Thus, thechannel width direction can be arranged parallel to the longitudinaldirection of the pixel electrode (an arrow 7001 in FIGS. 1 and 2).

Note that the longitudinal direction of the impurity region thatconnects the channel formation regions to each other is preferablyarranged parallel to the channel width direction. By this, as large aTFT as will fit can be placed in the narrow space between the pixelelectrodes (in the space between the adjacent pixel electrodes), wherebythe aperture ratio can be increased. Furthermore, in the impurityregion, since current flows in the longitudinal direction of theimpurity region, the resistance of the impurity region can be increased.Accordingly, off-current can be reduced.

However, in the present invention, the channel width can be increased upto the length of the longitudinal direction side when the channel widthdirection is perpendicular to the longitudinal direction of the pixelelectrode. Thus, the shape of the island-shaped semiconductor layer ofthe TFT is not limited to the U-shape as in this embodiment mode.

Note that the capacitor 300 can be formed of the second semiconductorlayer 102, the gate electrode 100, and a gate insulating film (a firststorage capacitor) formed between the second semiconductor layer 102 andthe gate electrode 100, and the gate electrode 100, the power supplyline 106, and an interlayer insulating film (a second storage capacitor)formed between the gate electrode 100 and the power supply line 106.

In this case, a storage capacitor is formed of the second semiconductorlayer 102, the gate electrode 100, and the gate insulating film formedbetween the second semiconductor layer 102 and the gate electrode 100 inthe dashed line portion 6012. Accordingly, by increasing the area of thegate electrode in the dashed line portion 6012, the size of the storagecapacitor can be increased.

With the above-described structure, as large a TFT as will fit(specifically, a TFT with a large channel width) can be placed in thenarrow space between the pixel electrodes (in the space between theadjacent pixel electrodes). Therefore, the aperture ratio can beincreased.

Note that the TFT is very small; therefore, there is a problem in thatelectric characteristics easily vary due to variations in film thicknessof the gate insulating film, variations in film quality, variations inan injection dose during an ion doping process, or the like.

In particular, when amorphous silicon, microcrystalline silicon, orpolycrystalline silicon is used as a semiconductor of the TFT,variations in the characteristics of the TFT (e.g., on-current,off-current, threshold voltage, mobility, or the like) caused by thecrystallinity of the semiconductor are generated. In particular, whenthe characteristics of the TFT connected to the pixel vary, current (orvoltage) to be supplied to the pixel varies; therefore, there is aproblem in that visibility of a display device deteriorates.

Thus, in order to solve the above-described problem, although there is amethod for adopting a multi-gate structure, a TFT with the multi-gatestructure has a larger area than a TFT with a single-gate structure.Therefore, when the TFT with the multi-gate structure is adopted inorder to decrease variations in the electric characteristics of the TFT,the aperture ratio is decreased. However, by using the structure of thepresent invention, variations in the characteristics of the TFT can bereduced, and the aperture ratio can be increased, as well.

Here, in this embodiment mode, an example of a so-called constantvoltage driving method in which the driving TFT operates in a linearregion is described. The constant voltage driving method is describedhereinafter.

There are the case where a TFT operates in a saturation region and thecase where a TFT operates in a linear region. A voltage between a gateand a source of a transistor is set as Vgs, a voltage between the sourceand a drain of the transistor is set as Vds, and a threshold voltage ofthe transistor is set as Vth. In this case, a range where a relationalexpression of |Vgs−Vth|<|Vds| is satisfied is referred to as asaturation region. On the other hand, a range where a relationalexpression of |Vgs−Vth|>|Vds| is satisfied is referred to as a linearregion.

By operating a TFT connected to a pixel electrode of an EL element(hereinafter referred to as a “driving TFT”) in a saturation region, amethod in which constant current flows to a display element is referredto as a constant current driving method.

In the constant current driving method, since constant current can flowto the EL element, variations due to deterioration of the displayelement can be reduced. However, in the constant current driving method,when the driving TFT deteriorates, current that flows to the driving TFTis also decreased. Accordingly, variations of the TFT easily affectvariations in brightness of the display element.

On the other hand, by operating the driving TFT in a linear region, amethod in which a constant voltage is applied to the EL element isreferred to as a constant voltage driving method.

In the constant voltage driving method, since the TFT operates in alinear region, a voltage between a source and a drain can be loweredcompared with a voltage between both electrodes of the display element.Therefore, variations of the driving TFT which affect current that flowsto the EL element can be reduced. Accordingly, variations in thedeterioration of the TFT do not easily affect variations in brightnessof the display element.

However, even when the driving TFT operates in a linear region, aneffect due to variations in the crystallinity in a plane of a substratecannot be ignored when amorphous silicon, microcrystalline silicon,polycrystalline silicon, or the like is used as the semiconductor layerof the TFT.

Thus, it is preferable that the area of the channel formation region ofthe driving TFT be increased in order to suppress variations of thedriving TFT. That is, a channel length and a channel width arepreferably increased.

In addition, the longer the channel width is, the lower the voltagebetween the source and the drain can be made. Furthermore, the shorterthe channel length is, the lower the voltage between the source and thedrain can be made. Therefore, the channel width is preferably longerthan the channel length.

Thus, when the TFT operates in a linear region, it is preferable thatthe channel width be increased in order to increase the area of thechannel formation region of the driving TFT.

Here, in general, by increasing the area of the channel formationregion, the aperture ratio of the display device tends to decrease. Thatis, when variations in the characteristics of the TFT are reduced, theaperture ratio decreases. Namely, in general, it is very difficult toreduce variations in the characteristics of the TFT and to increase theaperture ratio at the same time. This becomes apparent especially whenthe area of the channel formation region of the TFT with the multi-gatestructure is increased, as in this embodiment mode.

However, by using the structure of this embodiment mode, variations inthe characteristics of the TFT can be reduced and the aperture ratio canbe increased at the same time.

In addition, increasing the aperture ratio leads to a decrease in powerconsumption and an improvement in the reliability of the displayelement. That is to say, this is because the required brightness can beobtained at a lower current (or voltage) when the aperture ratio islarge, in the case where constant brightness is required. When current(or voltage) which is supplied to the display element is low, thedeterioration rate of the display element is reduced.

In addition, the deterioration rate of the display element also variesfrom display element to display element. Therefore, when the apertureratio is increased and the deterioration rate of the display device isdecreased, variations in the deterioration of brightness of the displayelement can be reduced, as well. Thus, by the synergistic effect of areduction in variations in the characteristics of the TFT and areduction in variations due to an improvement in the aperture ratio, thevisibility of the display device can be increased.

Note that off-current of the TFT can be reduced by a TFT with amulti-gate structure. Accordingly, even when a semiconductor of a TFT isnon-single crystal or a single crystal, it is preferable to use the TFTwith the multi-gate structure.

In addition, as in this embodiment mode, both the driving transistor andthe switching transistor connected to the driving transistor arearranged under the wiring (the signal line or the power supply line), achannel length direction of the switching transistor is arrangedperpendicular to a channel length direction of the driving transistor,and a channel width direction of the driving transistor is set as adirection in which current flows through the wiring. Thus, the apertureratio can be increased.

Embodiment Mode 2

In this embodiment mode, the meaning of “a longitudinal direction of awiring” will be specifically described with reference to FIGS. 5, 6, and7.

The “longitudinal direction of the wiring” (“channel width direction”)is the above-described “direction parallel to the direction in whichcurrent flows through the wiring arranged over the channel formationregion.” Note that, in the case of a wiring having a zigzag shape or awiring having a meander shape to be described later, current does notnecessarily flow in a linear direction in the wiring. In this case, the“longitudinal direction of the wiring” (“channel width direction”) is a“direction approximately parallel to the direction in which currentflows through a wiring region that is arranged over the channelformation region.”

Here, the shape of the wiring need is not necessarily a straight line asshown in FIG. 5. For example, as shown in FIG. 6, the shape of thewiring may be a zigzag shape, as first wirings 501 and 502. In addition,as shown in FIG. 7, the shape of the wiring may be a meander shape, asthe first wirings 501 and 502.

Note that FIGS. 5, 6, and 7 each show a schematic diagram showingarrangement of wirings and pixel electrodes. Therefore, a TFT is notillustrated. Reference numerals 501 to 504 are first wirings; 601 and602 are second wirings; and 701 to 707 are pixel electrodes. Note thatone of the first wiring and the second wiring is a source signal line,and the other thereof is a power supply line.

The zigzag shape is a shape having a line that proceeds by sharp turnsin alternating directions. “Meander” means to follow a winding orintricate course. In addition, the meander shape has such a shape.

As shown in FIG. 5, when the first wirings 501 to 504 and the secondwiring 601 each have a linear shape, the “longitudinal direction of thewiring (a first arrow 8001 of FIG. 5)” is a direction parallel to a“direction (the first arrow 8001 of FIG. 5) in which current flowsthrough the first wiring arranged over the channel formation region.”

When the wiring has a zigzag shape as shown in FIG. 6, for example, aTFT is arranged under a first wiring region 5001 of FIG. 6. In thiscase, the “longitudinal direction of the wiring (a second arrow 8002 ofFIG. 6)” is a direction parallel to a “direction (the second arrow 8002of FIG. 6) in which current flows through the wiring arranged over thechannel formation region.”

On the other hand, when the TFT is arranged under a second wiring region5002 of FIG. 6, for example, the “longitudinal direction of the wiring(a third arrow 8003 of FIG. 6)” is a direction parallel to a “direction(the third arrow 8003 of FIG. 6) in which current flows through thewiring arranged over the channel formation region.”

In addition, even when the wiring has a meander shape as shown in FIG.7, current flows along the shape of the wiring. Therefore, there is aportion in which current flows in a direction which is not parallel tothe longitudinal direction of the wiring. However, finally, electronsflow in a direction parallel to the longitudinal direction of the wiring(a fourth arrow 8004 of FIG. 7). Accordingly, in the case of using awiring having such a shape, the channel width direction is the“direction approximately parallel to the direction in which currentflows in the wiring region arranged over the channel formation region”or the “direction parallel to the longitudinal direction of the wiring.”

With the above-described structure, the wiring can be arranged in thenarrow space between the pixel electrodes (in the space between adjacentpixel electrodes). In addition, as large a TFT as will fit(specifically, a TFR with a large channel width) can be placed under thewiring. Therefore, the aperture ratio can be increased.

Embodiment Mode 3

In this embodiment mode, another variation of a layout of a drivingtransistor of the present invention will be exemplified. Note that thepresent invention is not limited to the layout exemplified in thisembodiment mode.

FIG. 8 shows a layout of a single-gate structure. The firstsemiconductor layer 101 is an island-shaped semiconductor layer of aswitching TFT. A region that overlaps with the gate wiring 105 is achannel formation region. A region that is connected to the signal line104 through a contact hole is a source terminal (or a drain terminal). Aregion that is connected to the connection electrode 103 is the drainterminal (or the source terminal).

Further, the second semiconductor layer 102 is the island-shapedsemiconductor layer of the driving TFT 301 that drives the displayelement. In addition, a region that overlaps with the gate electrode 100is a channel formation region. The gate electrode of the driving TFT 301is connected to the connection electrode 103 through a contact hole.Furthermore, the source terminal (or the drain terminal) of the drivingTFT 301 and the power supply line 106 are connected to each other. Thedrain terminal (or the source terminal) of the driving TFT 301 and theconnection electrode 108 are connected to each other through a contacthole. In addition, the pixel electrode 107 is formed in contact with theconnection electrode 108.

Note that a correspondence relation between FIGS. 8 and 3 is as follows.

A portion encircled by a dashed line portion 6002 corresponds to thedriving TFT 301.

A portion encircled by a dashed line portion 6021 corresponds to theswitching TFT 302.

A portion encircled by a dashed line portion 6022 corresponds to thecapacitor 300.

The pixel electrode 107 corresponds to the pixel electrode of thedisplay element 303.

The signal line 104 corresponds to the signal line 304.

The power supply line 106 corresponds to the power supply line 306.

In addition, FIG. 9 is a top view corresponding to FIG. 8 and a diagramof a stage in which the first semiconductor layer 101, the secondsemiconductor layer 102, the gate wiring 105, and the gate electrode 100are formed.

Patterning is performed such that an impurity region of thesemiconductor layer is parallel to a longitudinal direction of the pixelelectrode (or a direction in which current flows through the wiring or alongitudinal direction of the wiring) (the dashed line portion 6002 inFIGS. 8 and 9). Thus, a channel width direction can be arranged parallelto the longitudinal direction of the pixel electrode (an arrow 7002 inFIGS. 8 and 9).

FIG. 10 shows a layout of a triple-gate structure. The firstsemiconductor layer 101 is an island-shaped semiconductor layer of aswitching TFT. A region that overlaps with the gate wiring 105 is achannel formation region. A region that is connected to the signal line104 is a source terminal (or a drain terminal). A region that isconnected to the connection electrode 103 through a contact hole is thedrain terminal (or the source terminal).

Further, the second semiconductor layer 102 is the island-shapedsemiconductor layer of the driving TFT 301 that drives the displayelement. In addition, a region that overlaps with the gate electrode 100is a channel formation region. The gate electrode of the driving TFT 301is connected to the connection electrode 103. Furthermore, the sourceterminal (or the drain terminal) of the driving TFT 301 and the powersupply line 106 are connected to each other through a contact hole. Thedrain terminal (or the source terminal) of the driving TFT 301 and theconnection electrode 108 are connected to each other through a contacthole. In addition, the pixel electrode 107 is formed in contact with theconnection electrode 108.

Note that a correspondence relation between FIGS. 10 and 3 is asfollows.

A portion encircled by a dashed line portion 6003 corresponds to thedriving TFT 301.

A portion encircled by a dashed line portion 6031 corresponds to theswitching TFT 302.

A portion encircled by a dashed line portion 6032 corresponds to thecapacitor 300.

The pixel electrode 107 corresponds to the pixel electrode of thedisplay element 303.

The signal line 104 corresponds to the signal line 304.

The power supply line 106 corresponds to the power supply line 306.

In addition, FIG. 11 is a top view corresponding to FIG. 10 and adiagram of a stage in which the first semiconductor layer 101, thesecond semiconductor layer 102, the gate wiring 105, and the gateelectrode 100 are formed.

Patterning is performed such that an impurity region of a semiconductorlayer is parallel to a longitudinal direction of a pixel electrode (or adirection in which current flows through the wiring or a longitudinaldirection of the wiring) (e.g., S-shape) (the dashed line portion 6003in FIGS. 10 and 11). Accordingly, a channel width direction can bearranged parallel to the longitudinal direction of the pixel electrode(an arrow 7003 in FIGS. 10 and 11).

In this embodiment mode, the layout of the TFT with one channelformation region and the layout of the TFT with three channel formationregions are described. In addition, the layout of the TFT with twochannel formation regions is described in Embodiment Mode 1. However,the structure of the present invention is not limited to the structuresof these embodiment modes and a TFT with four or more channel formationregions can also be used.

Embodiment Mode 4

The present invention is not limited to a pixel including two TFTs. Inthe case of using a pixel structure having a driving TFT of adouble-gate structure of L<W, the present invention can be used asappropriate so as to make arrangement such that the aperture ratio isincreased, a simple opening shape is made, and a channel width isincreased.

Embodiment Mode 5

In this embodiment mode, a manufacturing process of a display devicewill be described. Note that in description, only a pixel portion isdescribed; however, a manufacturing process of a driver circuit portionis not limited to this, and description thereof is omitted here.

A base film formed of a silicon oxide film, a silicon nitride film, or asilicon oxynitride film is formed over a substrate formed of glass suchas barium borosilicate glass or alumino borosilicate glass, as shown inFIG. 4A. Then, a semiconductor film having an amorphous structure iscrystallized by using a laser crystallization method or a known thermalcrystallization method, and the crystalline semiconductor film ispatterned into a desired shape to obtain island-shaped semiconductorlayers 4101 and 4102. Note that the base film and the semiconductor filmcan be formed by a known film formation method (e.g., a CVD method, aPVD method, or the like).

Note that, here, a polycrystalline silicon film is used by crystallizingthe semiconductor film. However, in the present invention, amorphoussilicon or microcrystalline silicon may be used, as well. In addition,single crystal silicon may be used, as well.

In the case of using single crystal silicon, an SOI substrate (a SiliconOn Insulator substrate) in which a thin single crystal silicon layer isarranged on a substrate, or the like may be used.

Here, when an impurity is added to a first region to be a firstcapacitor portion in the island-shaped semiconductor layer 4101, thefirst region can function as a first electrode of a first capacitor.Here, boron which imparts p-type conductivity is injected by an iondoping method. Altemrnatively, an impurity which imparts n-typeconductivity may be injected. The impurity which imparts n-typeconductivity includes phosphorus, arsenic, and the like. Note that animpurity can be added by a known method (e.g., an ion doping method, anion shower method, or the like).

Next, a gate insulating film which covers the island-shapedsemiconductor layers 4101 and 4102 is formed. Then, a conductive filmfor forming a gate electrode is formed by using an element selected fromTa, W, Ti, Mo, Al, Cu, and the like; or an alloy material or a compoundmaterial containing the element as a main component. Then, theconductive film is patterned into a desired shape, and gate electrodes4103 and 4104 (the gate electrode 4104 also serves as a scanning line)are obtained (FIG. 4B).

Next, when an impurity is added to each impurity region of theisland-shaped semiconductor layers 4101 and 4102, a source region, adrain region and a channel formation region are formed. Here, boronwhich imparts p-type conductivity is injected by an ion doping methodfor forming a p-channel transistor. In the case of forming a n-channeltransistor, an impurity which imparts n-type conductivity may beinjected. The impurity which imparts n-type conductivity includesphosphorus, arsenic, and the like. Note that an impurity can be added bya known method (e.g., an ion doping method, an ion shower method, or thelike). In addition, an LDD region may be formed in a portion that is incontact with a channel formation region.

Next, the added impurity is activated by performing annealing. As anannealing method, a known technique such as furnace anneal or laseranneal may be used. Note that before annealing, a passivation film (e.g.silicon oxide or the like) may be formed by a known method (e.g. a CVDmethod, a PVD method, or the like) to protect the gate insulating film.

Next, an interlayer insulating film is formed. The interlayer insulatingfilm may be an organic insulating film or an inorganic insulating film.The organic insulating film can be formed of acrylic, polyimide,siloxane, or the like. As a method for forming the organic insulatingfilm, a known method (a spin coating method, a dipping method, or thelike) can be used. In addition, the inorganic insulating film can beformed of silicon oxide, silicon nitride, or the like. The inorganicinsulating film may be formed by a known method (e.g., a CVD method, aPVD method, or the like). Note that by using a material with a highdielectric constant, such as silicon nitride, capacitance can beincreased. On the other hand, in the case of using the organicinsulating film, planarization can be achieved.

Note that a planarization process may be performed on the interlayerinsulating film by a known technique (e.g., a CMP method).

Next, as shown in FIG. 4C, contact holes 4105, which reach theisland-shaped semiconductor layers 4101 and 4102 and the gate electrodes4103 and 4104, are formed. Wirings 4106, 4107, and 4108 (the wiring 4106serves as a source signal line and the wiring 4107 serves as a powersupply line), and an electrode 4110 are formed.

Next, as shown in FIG. 4D, a pixel electrode 4109 is formed. A materialof the pixel electrode is typified by indium tin oxide (commonly called“ITO”) or the like. After a film formed of the above-described materialis formed, the pixel electrode 4109 is patterned to obtain a desiredshape, as well. Here, the electrode 4110 and the pixel electrode 4109are in contact with each other through a contact hole 4105.

Next, a partition wall is formed between adjacent pixels, and a portionto serve as a light-emitting area is opened by patterning. Then, an ELlayer is formed in the opening portion.

In this embodiment mode, the method for manufacturing a top gate TFT isdescribed. However, the present invention can be used for a bottom gateTFT.

Embodiment Mode 6

In this embodiment mode, one example of an external appearance of alight-emitting display panel is described with reference to FIGS. 14Aand 14B. FIG. 14A is a top view of a panel which is obtained by sealinga space between a first substrate and a second substrate with a firstsealant 1205 and a second sealant 1206. FIG. 14B is a cross-sectionalview taken along a line A-A′ and a line B-B′ in FIG. 14A.

FIG. 14A shows a pixel portion 1202, a monitor element portion 1230, anda scanning line driver circuit (gate line driver circuit) 1203, each ofwhich is indicated by a dotted line. In this embodiment mode, the pixelportion 1202 and the scanning line driver circuit 1203 are located inthe region scaled with the first sealant and the second sealant. Areference numeral 1201 denotes a signal line (source line) drivercircuit which is provided over a first substrate 1200. As the firstsealant, an epoxy resin having high viscosity including a filler ispreferably used. On the other hand, the second sealant is preferably anepoxy resin having low viscosity. In addition, the first sealant 1205and the second sealant 1206 are desirably materials which transmit aslittle moisture or oxygen as possible.

In addition, a drying agent may be provided between the pixel portion1202 and the first sealant 1205. Further, a drying agent may be providedover the scanning line or the signal line in the pixel portion. Thedrying agent is preferably a substance which adsorbs water (H₂O) bychemical adsorption such as oxide of alkaline earth metal such ascalcium oxide (CaO) or barium oxide (BaO). However, the presentinvention is not limited to these, and a substance which adsorbs waterby physical adsorption such as zeolite or silica gel may alternativelybe used.

By using a resin having high moisture permeability and including aparticulate drying agent as an interlayer insulating film, theinterlayer insulating film may be fixed to a second substrate 1204 by asealant. As substitute for the resin having high moisture permeability,an inorganic substance such as phosphosilicate glass (PSG), orborophosphosilicate glass (BPSG) can alternatively be used.

In addition, a drying agent may be provided in a region that overlapswith the scanning line. Furthermore, by using a resin having highmoisture permeability and including a particulate drying agent as aninterlayer insulating film, the interlayer insulating film may be fixedto the second substrate 1204 by a sealant. By providing these dryingagents, intrusion of moisture into a display element and deteriorationresulting therefrom can be suppressed without decreasing the apertureratio. Therefore, variation in deterioration of the display elements inthe peripheral portion and the center portion of the pixel portion 1202can be suppressed.

Note that a connection wiring 1210 is a connection wiring fortransmitting a signal inputted to the signal line driver circuit 1201and the scanning line driver circuit 1203 and receiving a video signalor a clock signal from an FPC (Flexible Printed Circuit) 1209 whichserves as an external input terminal through a connection wiring 1208.

Next, a cross-sectional structure is described with reference to FIG.14B. Over the first substrate 1200, a driver circuit and a pixel portionare formed, which include a plurality of semiconductor elements typifiedby a TFT. The signal line driver circuit 1201 as the driver circuit andthe pixel portion 1202 are shown. Note that the signal line drivercircuit 1201 has a CMOS circuit including both an n-channel TFT 1221 anda p-channel TFT 1222.

Since the scanning line driver circuit and the TFT in the pixel portionare formed over one substrate in this embodiment mode, the volume of thelight-emitting display device can be decreased.

The pixel portion 1202 includes a plurality of pixels each including aswitching TFT 1211, a driving TFT 1212, and a first pixel electrode(anode) 1213 formed of a reflective conductive film which iselectrically connected to either one of a drain or source of the drivingTFT 1212.

In addition, an insulator 1214 (also referred to as a bank, partitionwall, barrier, mound, or the like) is formed on opposite ends of thefirst pixel electrode (anode) 1213. In order to enhance the coverage ofa film formed over the insulator 1214, the insulator 1214 is formed tohave a curved surface having curvature on the top end or the bottom end.Further, the surface of the insulator 1214 may be covered with aprotective film formed of an aluminum nitride film, an aluminum nitrideoxide film, a thin film including carbon as a main component, or asilicon nitride film. In addition, if an organic material in which amaterial which absorbs visible light such as a black colorant or pigmentis dissolved or dispersed is used for the insulator 1214, the straylight of a display element to be formed later can be absorbed.Therefore, contrast of each pixel can be improved. In the presentinvention, a scanning line, a signal line, and a TFT are arranged underthe insulator. In addition, a TFT is arranged under the scanning line orthe signal line. In the case where the TFT is arranged under thescanning line, a longitudinal direction of the scanning line (or adirection in which current flows) is arranged parallel to a channelwidth direction of the TFT. In the case where the TFT is arranged underthe signal line, a longitudinal direction of the signal line (or adirection in which current flows) is arranged parallel to the channelwidth direction of the TFT.

An electroluminescent layer 1215 is selectively formed over the firstpixel electrode (anode) 1213 by evaporating an organic compoundmaterial. In addition, a second pixel electrode (cathode) 1216 is formedover the electroluminescent layer 1215.

In this manner, a display element 1217 including the first pixelelectrode (anode) 1213, the electroluminescent layer 1215, and thesecond pixel electrode (cathode) 1216 is formed. The display element1217 emits light to the second substrate 1204 side.

In addition, a protective stacked layer 1218 is formed in order to sealthe display element 1217. The protective stacked layer 1218 has a stackof a first inorganic insulating film, a stress relaxation film, and asecond inorganic insulating film. Then, the protective stacked layer1218 is attached to the second substrate 1204 with the first sealant1205 and the second sealant 1206. Note that the second sealant ispreferably dropped using a device for dropping a sealant. After droppingor discharging the sealant from a dispenser and forming the sealant toan active matrix substrate, the second substrate is attached to theactive matrix substrate in vacuum and ultraviolet curing is performed;thereby sealing can be performed.

An antireflection film 1226 for preventing external light fromreflecting off a substrate surface is provided for the surface of thesecond substrate 1204. Either or both of a polarizing plate and aretardation plate may be provided between the second substrate and theantireflection film. By providing a retardation plate or a polarizingplate, external light can be prevented from reflecting off the pixelelectrode. Note that if the first pixel electrode 1213 and the secondpixel electrode 1216 are formed using a light-transmitting conductivefilm or a semi-light-transmitting conductive film, and the interlayerinsulating film is formed of a material which absorbs visible light oran organic material in which a material which absorbs visible light isdissolved or dispersed; each pixel electrode does not reflect externallight; therefore, the retardation plate and the polarizing plate are notnecessarily provided.

The connection wiring 1208 and the FPC 1209 are electrically connectedto each other through an anisotropic conductive film or an anisotropicconductive resin 1227. Further, it is preferable that a connectingportion between each wiring layer and a connecting terminal be sealedwith a sealing resin. With such a structure, moisture can be preventedfrom entering the display element from the cross-sectional portion anddeterioration can be prevented.

Note that the space between the second substrate 1204 and the protectivestacked layer 1218 may be filled with an inert gas such as nitrogen gas,instead of the second sealant 1206, so that deterioration can beprevented.

In addition, a colored layer may be provided between the secondsubstrate and the polarizing plate. In this case, full color display canbe performed by providing display elements capable of white lightemission in the pixel portion and additionally providing colored layersof RGB. Alternatively, full color display can be performed by providingdisplay elements capable of blue light emission in the pixel portion andadditionally providing a color conversion layer or the like. Furtheralternatively, display elements which emit red, green, and blue lightformed in the pixel portion and the colored layer may be used. Such adisplay module has high color purity of RGB, and is capable ofdisplaying high-resolution images.

In addition, a light-emitting display module may be formed using asubstrate formed of a film, a resin, or the like as one or both of thefirst substrate 1200 and the second substrate 1204. If the substrateformed of a film, resin, or the like is used in such a manner, weightsaving, downsizing, and thinning of the display device can be achieved.

Furthermore, the light-emitting display module may be formed byproviding an IC chip such as a controller, a memory, and a pixel drivercircuit for the surface or at the end of the FPC (Flexible PrintedCircuit) 1209 to serve as an external input terminal.

Embodiment Mode 7

A light-emitting element means an element (OLED element) having astructure in which an organic compound layer which emits light when anelectric field is generated is interposed between an anode and acathode; however, the present invention is not limited to this.

In addition, the light-emitting element means both an element thatutilizes light (fluorescence) emitted when making a transition from asinglet exciton to a base state, and an element that utilizes light(phosphorescence) emitted when making a transition from a tripletexciton to a base state.

As an organic compound layer, there are a hole injecting layer, a holetransporting layer, a light-emitting layer, an electron transportinglayer, an electron injecting layer, and the like. The basic structure ofa light-emitting element is a stack of an anode, a light-emitting layer,and a cathode in this order. Other than this, there are a structure ofstacking an anode, a hole injecting layer, a light-emitting layer, anelectron injecting layer, and a cathode in this order, a structure ofstacking an anode, a hole injecting layer, a hole transporting layer, alight-emitting layer, an electron transporting layer, an electroninjecting layer, and a cathode in this order, and the like.

Note that the organic compound layer is not limited to a layer having astacked structure in which the hole injecting layer, the holetransporting layer, the light-emitting layer, the electron transportinglayer, the electron injecting layer, and the like are clearlydistinguished. That is, the organic compound layer may have a structureincluding a layer in which respective materials forming the holeinjecting layer, the hole transporting layer, the light-emitting layer,the electron transporting layer, the electron injecting layer, or thelike are mixed.

Further, an inorganic material may be mixed, as well.

Further, any material of a low molecular material, a high molecularmaterial, and a medium molecular material can be used for the organiccompound layer of an OLED element.

Note that in this specification, a medium molecular material does nothave the sublimation property, and a molecular chain length thereof is10 μm or less.

Embodiment Mode 8

Another structure applicable to the display element of the presentinvention is described with reference to FIGS. 12A to 12C and 13A to13C.

Light emitting elements (display elements) utilizing electroluminescenceare classified according to whether a light emitting material is anorganic compound or an inorganic compound. In general, the former isreferred to as an organic EL element, and the latter is referred to asan inorganic EL element.

The inorganic EL elements are classified according to their elementstructures into a dispersed inorganic EL element and a thin-filminorganic EL element. They are different in that the former includes anelectroluminescent layer in which particles of a light emitting materialare dispersed in a binder and the latter includes an electroluminescentlayer formed of a thin film of a light emitting material; however, theyare common in that electrons accelerated by a high electric field arerequired. Note that a mechanism for obtainable light emission includes adonor-acceptor recombination light emission which utilizes a donor leveland an acceptor level and a localized light emission which utilizesinner-shell electron transition of metal ions. In general, it is oftenthe case that the dispersed inorganic EL element performs thedonor-acceptor recombination light emission and the thin-film inorganicEL element performs the localized light emission.

A light emitting material which can be used in the present inventionincludes a base material and an impurity element serving as a lightemitting center. Light emission of various colors can be obtained bychanging impurity elements to be contained. As a method for producing alight emitting material, various methods such as a solid phase methodand a liquid phase method (coprecipitation method) can be used. Inaddition, a liquid phase method such as a spray pyrolysis method, adouble decomposition method, a method by precursor pyrolysis, a reversemicelle method, a combined method of one of these methods andhigh-temperature baking, or a freeze-drying method can be used.

The solid phase method is a method by which a base material and animpurity element or a compound containing an impurity element areweighed, mixed in a mortar, and reacted by heating and baking in anelectric furnace to make the impurity element contained in the basematerial. The baking temperature is preferably in the range of 700° C.to 1500° C. This is because solid phase reaction does not proceed whenthe temperature is too low and the base material is decomposed when thetemperature is too high. Note that the baking may be performed in powderform, but the baking is preferably performed in pellet form. The methodrequires baking at a relatively high temperature; however, it is asimple method. Therefore, the method provides good productivity and issuitable for mass production.

The liquid phase method (coprecipitation method) is a method by which abase material or a compound containing a base material is reacted in asolution with an impurity element or a compound containing an impurityelement and the reactant is baked after being dried. Particles of thelight emitting material are uniformly distributed; a particle size issmall; and the reaction proceeds even at a low baking temperature.

As the base material used for a light emitting material, sulfide, oxide,or nitride can be used. As sulfide, zinc sulfide (ZnS), cadmium sulfide(CdS), calcium sulfide (CaS), yttrium sulfide (Y₂S₃), gallium sulfide(Ga₂S₃), strontium sulfide (SrS), barium sulfide (BaS), or the like canbe used, for example. As oxide, zinc oxide (ZnO), yttrium oxide (Y₂O₃),or the like can be used, for example. As nitride, aluminum nitride(AlN), gallium nitride (GaN), indium nitride (InN), or the like can beused, for example. Further, zinc selenide (ZnSe), zinc telluride (ZnTe),or the like can also be used. It may be a ternary mixed crystal such ascalcium gallium sulfide (CaGa₂S₄), strontium gallium sulfide (SrGa₂S₄),barium gallium sulfide (BaGa₂S₄), or the like.

As the light emitting center of localized light emission, manganese(Mn), copper (Cu), samarium (Sm), terbium (Tb), erbium (Er), thulium(Tm), europium (Eu), cerium (Ce), praseodymium (Pr), or the like can beused. Note that a halogen element such as fluorine (F) or chlorine (Cl)may be added as charge compensation.

On the other hand, as the light emitting center of donor-acceptorrecombination light emission, a light emitting material which contains afirst impurity element forming a donor level and a second impurityelement forming an acceptor level can be used. As the first impurityelement, fluorine (F), chlorine (Cl), aluminum (Al), or the like can beused, for example. As the second impurity element, copper (Cu), silver(Ag), or the like can be used, for example.

In the case of synthesizing the light emitting material ofdonor-acceptor recombination light emission by a solid phase method, abase material, a first impurity element or a compound containing a firstimpurity element, and a second impurity element or a compound containinga second impurity element are separately weighed, mixed in a mortar, andthen heated and baked in an electric furnace. As the base material, theabove-mentioned base material can be used. As the first impurityelement, fluorine (F), chlorine (Cl), or the like can be used, forexample. As the compound containing the first impurity element, aluminumsulfide (Al₂S₃) or the like can be used, for example. As the secondimpurity element, copper (Cu), silver (Ag), or the like can be used, forexample. As the compound containing the second impurity element, coppersulfide (Cu₂S), silver sulfide (Ag₂S), or the like can be used, forexample. The baking temperature is preferably in the range of 700° C. to1500° C. This is because solid phase reaction does not proceed when thetemperature is too low and the base material is decomposed when thetemperature is too high. Note that the baking may be performed in powderform, but the baking is preferably performed in pellet form.

As the impurity element in the case of utilizing solid phase reaction, acompound including the first impurity element and the second impurityelement may be used. In this case, the impurity element is easilydiffused and the solid phase reaction easily proceeds, so that a uniformlight emitting material can be obtained. Furthermore, a high-puritylight emitting material can be obtained since an unnecessary impurityelement is not mixed. As the compound including the first impurityelement and the second impurity element, copper chloride (CuCl), silverchloride (AgCl), or the like can be used, for example.

Note that the concentration of the impurity element to the base materialmay be in the range of 0.01 atomic % to 10 atomic %, preferably 0.05atomic % to 5 atomic %.

In the case of the thin-film inorganic EL element, theelectroluminescent layer is a layer containing the above-described lightemitting material, which can be formed by a vacuum evaporation methodsuch as a resistance heating evaporation method or an electron beamevaporation (EB evaporation) method, a physical vapor deposition (PVD)method such as a sputtering method, a chemical vapor deposition (CVD)method such as an metal organic CVD method or a low-pressure hydridetransfer CVD, an atomic layer epitaxy (ALE) method, or the like.

FIGS. 12A to 12C each show an example of a thin-film inorganic ELelement which can be used as a display element. In each of FIGS. 12A to12C, a display element includes a first electrode layer 50, anelectroluminescent layer 52, and a second electrode layer 53.

Each of the display elements shown in FIGS. 12B and 12C has a structurein which an insulating layer is provided between the electrode layer andthe electroluminescent layer in the display element in FIG. 12A. Thedisplay element shown in FIG. 12B includes an insulating layer 54between the first electrode layer 50 and the electroluminescent layer52. The display element shown in FIG. 12C includes an insulating layer54 a between the first electrode layer 50 and the electroluminescentlayer 52 and an insulating layer 54 b between the second electrode layer53 and the electroluminescent layer 52. As described above, theinsulating layer may be provided between the electroluminescent layerand either or both of the pair of electrode layers sandwiching theelectroluminescent layer. The insulating layer may be a single layer ora stack of a plurality of layers.

In FIG. 12B, the insulating layer 54 is provided to be in contact withthe first electrode layer 50. However, the insulating layer 54 may beprovided to be in contact with the second electrode layer 53 byreversing the order of the insulating layer and the electroluminescentlayer.

In the case of the dispersed inorganic EL element, a particulate lightemitting material is dispersed in a binder to form a filmelectroluminescent layer. In the case where a particle having a desiredsize cannot be sufficiently obtained by a production method of a lightemitting material, the material may be processed into particles bycrushing in a mortar or the like. The binder is a substance for fixing aparticulate light emitting material in a dispersed manner and holdingthe material in shape as the electroluminescent layer. The lightemitting material is uniformly dispersed and fixed in theelectroluminescent layer by the binder.

In the case of the dispersed inorganic EL element, theelectroluminescent layer can be formed by a droplet discharge methodwhich can selectively form the electroluminescent layer, a printingmethod (such as screen printing or off-set printing), a spin-coatingmethod, a dipping method, a dispenser method, or the like. The thicknessis not particularly limited, but it is preferably in the range of 10 nmto 1000 nm. In addition, in the electroluminescent layer containing thelight emitting material and the binder, the proportion of the lightemitting material is preferably in the range of 50 wt % to 80 wt %.

FIGS. 13A to 13C each show an example of a dispersed inorganic ELelement which can be used as a display element. A display element inFIG. 13A has a stacked structure of a first electrode layer 60, anelectroluminescent layer 62, and a second electrode layer 63, andcontains a light emitting material 61 held by a binder in theelectroluminescent layer 62.

As the binder which can be used in this embodiment mode, an organicmaterial or an inorganic material, or a mixed material of an organicmaterial and an inorganic material can be used. As an organic material,a polymer having a relatively high dielectric constant, such as acyanoethyl cellulose resin, or a resin such as polyethylene,polypropylene, a polystyrene resin, a silicone resin, an epoxy resin, orvinylidene fluoride can be used. Alternatively, a heat resistant highmolecular compound such as aromatic polyamide or polybenzimidazole, or asiloxane resin may be used. Note that the siloxane resin corresponds toa resin including a Si—O—Si bond. Siloxane includes a skeleton formedfrom a bond of silicon (Si) and oxygen (O). An organic group containingat least hydrogen (for example, an alkyl group or aromatic hydrocarbon)or a fluoro group may be used for a substituent, or an organic groupcontaining at least hydrogen and a fluoro group may be used forsubstituents. Alternatively, a resin material such as a vinyl resin ofpolyvinyl alcohol, polyvinylbutyral, or the like, a phenol resin, anovolac resin, an acrylic resin, a melamine resin, a urethane resin, oran oxazole resin (polybenzoxazole) may be used. A dielectric constantcan be adjusted by appropriately mixing high dielectric constant fineparticles such as barium titanate (BaTiO₃) or strontium titanate(SrTiO₃) in the above resin.

As an inorganic material included in the binder, a material selectedfrom substances containing inorganic materials can be used, such assilicon oxide (SiO_(X)), silicon nitride (SiN_(X)), silicon containingoxygen and nitrogen, aluminum nitride (AlN), aluminum containing oxygenand nitrogen, aluminum oxide (Al₂O₃), titanium oxide (TiO₂), BaTiO₃,SrTiO₃, lead titanate (PbTiO₃), potassium niobate (KNbO₃), lead niobate(PbNbO₃), tantalum oxide (Ta₂O₅), barium tantalate (BaTa₂O₆), lithiumtantalate (LiTaO₃), yttrium oxide (Y₂O₃), zirconium oxide (ZrO₂), orZnS. A dielectric constant of the electroluminescent layer including thelight emitting material and the binder can be controlled by making anorganic material to contain a high dielectric constant inorganicmaterial (by addition or the like), so that a dielectric constant can beincreased.

In a manufacturing process, a light emitting material is dispersed in asolution including a binder. As a solvent of the solution including thebinder that can be used in this embodiment mode, a solvent in which abinder material is soluble and which can produce a solution having aviscosity suitable for a method for forming the electroluminescent layer(various wet processes) and a desired thickness, may be selectedappropriately. An organic solvent or the like can be used. In the caseof using, for example, a siloxane resin as the binder, propylene glycolmonomethyl ether, propylene glycol monomethyl ether acetate (alsoreferred to as PGMEA), 3-methoxy-3-methyl-1-butanol (also referred to asMMB), or the like can be used.

Each of the display elements shown in FIGS. 13B and 13C has a structurein which an insulating layer is provided between the electrode layer andthe electroluminescent layer in the display element in FIG. 13A. Thedisplay element shown in FIG. 13B includes an insulating layer 64between the first electrode layer 60 and the electroluminescent layer62. The display element shown in FIG. 13C includes an insulating layer64 a between the first electrode layer 60 and the electroluminescentlayer 62 and an insulating layer 64 b between the second electrode layer63 and the electroluminescent layer 62. As described above, theinsulating layer may be provided between the electroluminescent layerand either or both of the pair of electrode layers sandwiching theelectroluminescent layer. In addition, the insulating layer may be asingle layer or a stack of a plurality of layers.

In FIG. 13B, the insulating layer 64 is provided to be in contact withthe first electrode layer 60. However, the insulating layer 64 may beprovided to be in contact with the second electrode layer 63 byreversing the order of the insulating layer and the electroluminescentlayer.

An insulating layer such as the insulating layer 54 in FIGS. 12A to 12Cor the insulating layer 64 in FIGS. 13A to 13C is not particularlylimited, but it preferably has dielectric strength voltage and densefilm quality. Furthermore, it preferably has a high dielectric constant.For example, a film of silicon oxide (SiO₂), yttrium oxide (Y₂O₃),titanium oxide (TiO₂), aluminum oxide (Al₂O₃), hafnium oxide (HfO₂),tantalum oxide (Ta₂O₅), barium titanate (BaTiO₃), strontium titanate(SrTiO₃), lead titanate (PbTiO₃), silicon nitride (Si₃N₄), zirconiumoxide (ZrO₂), or the like, a mixed film thereof, or a stacked film oftwo or more kinds can be used. These insulating films can be formed bysputtering, evaporation, CVD, or the like. Alternatively, the insulatinglayer may be formed by dispersing particles of the Insulating materialin a binder. A binder material may be formed using a material and amethod similar to those of the binder included in the electroluminescentlayer. The thickness is not particularly limited, but it is preferablyin the range of 10 nm to 1000 nm.

The display element described in this embodiment mode, which can providelight emission by applying voltage between a pair of electrode layerssandwiching the electroluminescent layer, can be operated by either DCdrive or AC drive.

Embodiment Mode 9

In each of Embodiment Modes 1 to 8, the example of the display devicemainly using electroluminescence is described. However, the presentinvention is applicable to various active matrix display devices. Otherdisplay devices include, for example, a liquid crystal display device,an FED (Field Emission Display), and the like.

Embodiment Mode 10

The present invention can be applied to various semiconductor devices aswell as a display device (note that a semiconductor device is a conceptincluding a display device).

For example, there is a memory element (storage element) such as DRAM(Dynamic Random Access Memory). FIG. 15A is a circuit diagram of theDRAM. A unit in which one terminal of a transistor 401 and a cell plate402 (capacitor) are connected to each other is considered as one cell.In addition, one cell is connected to another cell with a wiring. Theother terminal of the transistor 401 is connected to a bit line 403. Inaddition, a gate of the transistor 401 is connected to a word line 404.

The principle of operation of the DRAM is described. In the case wherethe transistor 401 is an N-channel transistor, by applying a positivevoltage to the bit line 403 and the word line 404, a charge is stored inthe cell plate 402 during a data writing period. During a data readingperiod, by applying a positive voltage to the word line, the chargestored in the cell plate 402 flows to the bit line 403. In the casewhere the transistor 401 is a P-channel transistor, a voltage withreversed polarity may be applied during each period.

Furthermore, the capacitance of the cell plate 402 increases as the areathereof increases. By increasing the capacitance, generation of a softerror (an error in which Information stored in the memory cell is lost(rewritten) due to collision of cosmic rays and the like), or the likecan be suppressed. Accordingly, in order to increase the capacitance ofthe capacitor, it is necessary to increase the surface area of thecapacitor.

Thus, a wiring is provided between adjacent electrodes; a thin filmtransistor connected to a capacitor is arranged under the wiring; and achannel width direction of a channel formation region of the thin filmtransistor is arranged parallel to the direction in which current flowsthrough the wiring, or arranged parallel to a longitudinal direction ofthe electrode. Thus, the capacitance of the capacitor can be increased.

In this embodiment mode, as shown in FIG. 16, a channel width directionof the transistor 401 is arranged parallel to a longitudinal directionof the cell plate 402 (or the electrode of the capacitor) (an arrow 7004in FIG. 16). The transistor 401 may have a single-gate structure or amulti-gate structure.

Note that the DRAM may have a stack type structure or a trench typestructure. The stack type structure is such that an insulating film isformed, and then, a step is provided over a 165 substrate by etching theinsulating film, and a capacitor is embedded in the step. Meanwhile, thetrench type structure is such that a step is provided by etching asubstrate, and a capacitor is embedded in the step.

Note that as a method for manufacturing the DRAM having the stack typestructure, a transistor is formed using SOI (Silicon On Insulator) by aknown method, or a TFT is formed by the method described in EmbodimentMode 3. Then, an insulating film can be formed using acrylic, polyimide,siloxane, silicon oxide, silicone nitride, or the like, for example.Next, the insulating film is patterned, and then, a step is formed byetching.

Then, a lower electrode which is in contact with either one of a sourceregion or drain region of the transistor can be formed of metal such asaluminum, for example. Next, a dielectric film can be formed of titaniumoxide, tantalum oxide, silicone nitride, silicon oxide, or the like, forexample. Then, an upper electrode can be formed of tungsten silicide,polysilicon, or the like, for example, thereby forming a capacitor inthe step.

In addition, as a method for manufacturing the DRAM having the trenchtype structure, first, patterning is performed on a substrate, and then,a step is formed on the substrate by etching. Then, a transistor isformed using SOI (Silicon On Insulator) by a known method, or a TFT isformed by the method described in Embodiment Mode 3.

Then, a lower electrode which is in contact with either one of a sourceregion or drain region of the transistor can be formed of metal such asaluminum, for example. Next, a dielectric film can be formed of titaniumoxide, tantalum oxide, silicone nitride, silicon oxide, or the like, forexample. Then, an upper electrode can be formed of tungsten silicide,polysilicon, or the like, for example, thereby forming a capacitor inthe step.

In addition, even when an element other than the DRAM is used, thepresent invention can be used in the case where the area of the elementis expanded. FIG. 15B is a circuit diagram of an element to which thepresent invention can be applied. A unit in which one terminal of atransistor 411 and an element 412 are connected to each other isconsidered as one cell. In addition, one cell is connected to anothercell with a wiring. The other terminal of the transistor 411 isconnected to a first wiring 413. In addition, a gate of the transistor411 is connected to a second wiring 414.

Thus, a wiring is provided between the adjacent elements; a thin filmtransistor connected to the element is arranged under the wiring; and achannel width direction of a channel formation region of the thin filmtransistor is arranged parallel to the direction in which current flowsthrough the wiring, or arranged parallel to a longitudinal direction ofthe element. Thus, the area of the element or the number of elements canbe increased.

As the element 412, an organic memory, a photodiode, a piezoelectricelement, or the like can be used, for example.

When an organic memory is used as the element 412, a storage element canbe formed. Note that, as a method of the organic memory, there are amethod in which memory is performed electrically by the selection of thefirst wiring 413 and the second wiring 414; a method in which memory isperformed optically in such a way that the organic memory element, whichuses an organic material, that is, a conjugated polymer material dopedwith a photoacid generator, is irradiated with laser light; and thelike. When the organic memory element is formed, a certain amount of thearea is necessary. In addition, in order to increase memory capacity, itis effective to increase the number of memory elements. Therefore, byusing the structure of the present invention, the number of memoryelements can be increased, which is effective.

In addition, an optical sensor can be formed when a photodiode is usedfor the element 412. As the kinds of photodiodes, there are a PNphotodiode, a PIN photodiode, an avalanche photodiode, a Schottkyphotodiode, and the like. The photoelectric conversion efficiencyincreases as the area of the photodiode increases; therefore, it iseffective to use the structure of the present invention.

In addition, by using a piezoelectric element as the element 412, apressure sensor can be formed. Furthermore, a touch panel can be formedby forming a piezoelectric element and a display element over onesubstrate. As the piezoelectric element, there are a pressure sensitivesensor provided with a parallel-plate capacitor; a strain gage pressuresensor in which p-type silicon crystal is doped with an n-type impurityby thermal diffusion and a compensated intrinsic semiconductor regionwith high-resistance is used as a strain gage; and the like. When thepiezoelectric element is formed, a certain amount of the area isnecessary. In addition, a sensor with high sensitivity can be providedwhen the piezoelectric element has a larger area. Thus, it is effectiveto use the structure of the present invention.

As described above, the present invention can be applied to varioussemiconductor devices.

Embodiment Mode 11

A display device of the present invention can be used for displayportions of various electronic devices. In particular, a display deviceof the present invention is desirably used for mobile devices requiredto be thin and light weight. In addition, the semiconductor device ofthe present invention can be used for various electronic devices. Inparticular, the semiconductor device of the present invention isdesirably used for mobile devices required to be thin and light weight.

Examples of electronic devices using the display device or thesemiconductor device of the present invention in their housings aregiven as follows: a television apparatus (simply referred to as TV,television, or television receiver), a camera (a video camera, a digitalcamera, or the like), a goggle type display, a navigation system, anaudio reproducing device (car audio, an audio component, or the like), acomputer, a game machine, a portable information terminal (a mobilecomputer, a portable phone, a portable game machine, an electronic bookdevice, or the like), an image reproducing device provided with arecording medium (specifically, a device which reproduces a recordingmedium such as a DVD (Digital Versatile Disc), an HD DVD (HighDefinition DVD), or a Blu-ray Disk and which is equipped with a displayfor displaying the image), and other electronics each having a displayportion. Specific examples of these electronic devices are shown inFIGS. 17A to 17F.

A portable information terminal shown in FIG. 17A includes a main body9201, a display portion 9202, and the like.

A digital video camera shown in FIG. 17B includes a main body 9702, adisplay portion 9701, and the like.

A portable terminal shown in FIG. 17C includes a main body 9101, adisplay portion 9102, and the like.

A portable television apparatus shown in FIG. 17D includes a main body9301, a display portion 9302, and the like. Such a television apparatuscan be widely applied to a small size television apparatus mounted on aportable terminal such as a portable phone, a medium size one which canbe carried, and a large size one (e.g., 40 inches or more).

A portable computer shown in FIG. 17E includes a main body 9401, adisplay portion 9402, and the like.

A television apparatus shown in FIG. 17F includes a main body 9501, adisplay portion 9502, and the like.

As described above, the present invention can be applied widely and usedin manufacturing methods of every field of electronic devices.

This application is based on Japanese Patent Application serial No.2006-199292 filed in Japan Patent Office on Jul. 21, 2006, the entirecontents of which are hereby incorporated by reference.

What is claimed is:
 1. A display device comprising: first and secondtransistors over a resin; first and second wirings over the resin; andan electroluminescent element over the resin, wherein the first wiringis electrically connected to one of a source and a drain of the firsttransistor, wherein the second wiring is electrically connected to oneof a source and a drain of the second transistor, wherein theelectroluminescent element is electrically connected to the other of thesource and the drain of the first transistor, wherein a channelformation region of the first transistor comprises a region throughwhich carriers flow in a first direction, wherein a semiconductor layercomprising the channel formation region of the first transistor has abent shape, wherein the first wiring is configured to transmit currentflowing the electroluminescent element through the first transistor,wherein the first wiring comprises a region overlapping with thesemiconductor layer, wherein the first wiring has a shape which is longalong a direction intersecting with the first direction, wherein thesecond transistor is configured to supply a signal from the secondwiring to the first transistor, wherein the second wiring comprises aregion overlapping with the semiconductor layer, wherein the channelformation region of the first transistor comprises crystal silicon, andwherein a channel formation region of the second transistor comprisescrystal silicon.
 2. A display device comprising: first and secondtransistors over a resin; first and second wirings over the resin; andan electroluminescent element over the resin, wherein the first wiringis electrically connected to one of a source and a drain of the firsttransistor, wherein the second wiring is electrically connected to oneof a source and a drain of the second transistor, wherein theelectroluminescent element is electrically connected to the other of thesource and the drain of the first transistor, wherein a channelformation region of the first transistor comprises a region throughwhich carriers flow in a first direction, wherein a semiconductor layercomprising the channel formation region of the first transistor has abent shape, wherein the first wiring is configured to transmit currentflowing the electroluminescent element through the first transistor,wherein the first wiring comprises a region overlapping with thesemiconductor layer, wherein the first wiring has a shape which is longalong a direction intersecting with the first direction, wherein thesecond transistor is configured to supply a signal from the secondwiring to the first transistor, wherein the second wiring comprises aregion overlapping with the semiconductor layer, wherein the secondwiring has a shape which is long along the direction intersecting withthe first direction, wherein the channel formation region of the firsttransistor comprises crystal silicon, and wherein a channel formationregion of the second transistor comprises crystal silicon.